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PlantU DMS

PlantU DMS combines interactive defect analysis with automated defect data processing. It processes inspection-equipment data and provides an accessible analysis interface to accelerate root-cause investigation and defect improvement.

Product Functions

Automated defect data processing: transfer files, convert formats and import data from AOI and other semiconductor inspection equipment, with support for multiple equipment formats.

Interactive defect analysis: explore advanced tools including Stack Map, Defect to CP and Defect Zone Analysis.

Deployment Benefits

1
Defect map analysis: examine defect distributions and images, and analyze reticle and regional repeatability.
2
Defect map analysis: examine defect distributions and images, and analyze reticle and regional repeatability.
3
Defect image classification: classify defect images to support root-cause analysis and help engineers identify process issues more efficiently.
4
Overlay defects with electrical test data and use Kill Ratio analysis to classify their impact on yield.
5
Overlay defects with electrical test data and use Kill Ratio analysis to classify their impact on yield.
6
AI analysis: Identify spatial patterns in defects and quickly detect non-random anomalies.

Learn more about AI solutions

Phone

Business inquiries:
400-668-2600Maintenance Hotline:
400-699-7988
Contact
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Business inquiries: marketing@semi-tech.com

After-Sales Maintenance: semitech-ma@semi-tech.com
Recruitment: zhaopin@semi-tech.com

Investor Relations: ir@semi-tech.com
Maintenance Hotline: 400-699-7988

Market promotion: 400-668-2600

Suzhou:

10F-12F, Building B5, SISPARK Dushu Lake Digital Economy Industrial Park

Shenzhen:

Room 503, Northern Auto Building, No. 284 Baomin 1st Road, Baoan District

Beijing:

24F, Block A2, Junhao Central Park Plaza, Chaoyang Park South Road, Chaoyang District

Chengdu:

Room 603, Building 2A, Jingronghui Park, Tianfu 5th Street, High-tech Zone

Hangzhou:

Room 1206, Building C2, Fuchun Park, China Intelligent Valley, Fuyang District

Hefei:

Room 909, 9F, Building 1, Sino-German Cooperation Innovation Park, Economic Development Zone

Xiamen:

Unit 1504-2, No. 8 Chengyi North Street, Software Park Phase III, Jimei District, Xiamen

Guangzhou:

6F006/6F007, No. 5 Taozhuang Road, Shadong Street, Tianhe District

Jinan:

Unit H, 14F, Building 1, Xinsheng Tower, 1299 Xinluo Avenue, High-tech Zone, Jinan

Zhuzhou:

Unit 2002-1, Building 6, Dahan Hilton International, 8 Yanjiang Middle Road, Lusong District, Zhuzhou

Zhengzhou:

7F, Building 4, Artificial Intelligence Industrial Park, Zhongyuan Science and Technology City, Zhengdong New District, Zhengzhou

Hong Kong:

Room 217, 2F, Building 12W, Phase 3, Hong Kong Science Park, Pak Shek Kok, Tai Po

Singapore:

3A International Business Park, Icon @IBP, Tower B #06-10 Singapore 609935

Penang:

No.108-B-01-03 Level 1, SETIA SPICE Canopy, Jalan Tun Dr Awang, 11900 Pulau Pinang, Malaysia.

Tokyo:

10F, Tokyo Portcity Takeshiba, 1-7-1 Kaigan, Minato-ku, Tokyo 105-7510, Japan

Production Management

Planning and Scheduling

Quality Management

Equipment Automation

Logistics Management

General Tools

Business Management