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PlantU AMS
PlantU AMS

PlantU AMS collects real-time semiconductor equipment alarms and applies response rules based on their impact. Timely notifications and process interventions reduce quality risks and improve yield.

Product Functions
Short development cycles and easy maintenance, with alarm data collection built on our core EAP system.
A stable, efficient web architecture separates the user interface from backend services, supports expansion across platforms and meets high-concurrency and availability requirements.
Real-time response: Filter alarms by equipment status in MES and trigger configured actions on the equipment immediately.
Flexible data acquisition methods support deployment as a factory-wide alarm platform.
Deployment Benefits
  • 1
    Automatically hold affected lots, change or lock equipment, and notify responsible teams to improve production quality and yield.
  • 2
    Record alarm histories, query executed actions, and analyze statistics for traceability.
  • 3
    Escalate unresolved alarms automatically to ensure a timely response.
  • 4
    Bring equipment and system alarms together on a unified alarm management platform.
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