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PlantU FDC
PlantU FDC

PlantU FDC collects equipment parameters and monitors changes to detect abnormal trends automatically. Accurate monitoring models help prevent production disruptions and improve equipment availability, capacity and process yield.

Product Functions
Adaptive monitoring: configure algorithms and extend features visually, with models trained across multiple databases for accuracy and scalability under heavy loads.
Low-impact data integration: PT collection minimizes coupling with MES and EAP, while centralized configuration monitors raw and statistical data together.
Agile rule management: Configure rules and alarm strategies visually, reuse templates, and adapt control windows to different scenarios.
Deployment Benefits
  • 1
    Process stability: Detect abnormal flows, consumables, and components to maintain equipment performance and improve yield.
  • 2
    Equipment traceability: use processing data to identify abnormal components and help engineers analyze equipment characteristics.
  • 3
    Prevent batch scrapping: Intercept abnormal equipment processing before it damages entire wafer lots.
  • 4
    Optimize equipment availability: support maintenance decisions and identify faulty components to shorten recovery time.
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